In Li-ion battery, the layers that comprise the anode, cathode, and electrolyte in thin film batteries are often deposited using sputtering targets.

Cathode materials are often complex lithium-oxides such as LiCoO2, LiMn2O4, and LiFePO4. Anode materials are typically comprised of carbon based materials such as graphite, Li metal, or other metallic materials.

Series of targets for lithium battery thin film for production research.

Lithium aluminate LiAlO2 target

Lithium manganate LiMn2O4 target

Lithium cobaltate LiCoO2 target

Lithium carbonate Li2CO3 target

Lithium lanthanide titanium oxide LaLiTiO3 target

Lithium phosphate Li3PO4 target

Lithium lanthanum titanium oxide LaLiTiO3 target

Lithium nickelate LiNiO2 target

Lithium iron phosphate LiFePO4 targets.