Sputtering Targets

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Copper (Cu) Sputtering Target

Description:

Copper sputter targetsare used for CD-ROM, decoration, semiconductor, display, LED and photovoltaic devices, functional coating as nicely as other optical information storage space industry, glass coating industry like car glass and architectural glass, optical communication, etc. Sputtering i...

Detail

Copper sputter targets are used for CD-ROM, decoration, semiconductor, display, LED and photovoltaic devices, functional coating as nicely as other optical information storage space industry, glass coating industry like car glass and architectural glass, optical communication, etc. Sputtering is a process whereby atoms are ejected from a solid target material due to the bombardment of the target by energetic particles. The extreme miniaturization of components in the semiconductor and electronics industry requires high purity sputtering targets for thin film deposition.

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Cu sputtering target

Specifications
Material TypeCopper
SymbolCu
Purity99.99%~99.9999%
Size1.00" Dia. x 0.125" Thick ~8.00" Dia x  0.250" Thick / Custom
Package Unit1pc
Atomic Weight63.546Z Ratio0.437
Color/AppearanceCopper, MetallicSputterDC
Thermal ConductivityCopper, MetallicMax Power Density(Watts/Square Inch)200*
Melting Point (°C)1,083Type of BondIndium, Elastomer
Coefficient of Thermal Expansion16.5 x 10-6/KMax Power Density(Watts/Square Inch)100*
Theoretical Density (g/cc)8.92CommentsAdhesion poor. Use interlayer (Cr). Evaporates using any source material


 


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