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Lead Zirconium Titanate, PZT (PbZr0.52Ti0.48O3) Sputtering Targets
PZT thin films are one of the most effective materials attractive for MEMs applications.
Due to their outstanding piezoelectric response and high polarization.
PZT thin films of ferroelectric materials have been extensively utilized for Micro-Electro-Mechanical Systems (MEMs),
scanning mirrors, micro-pumps and valves, radio-frequency switches, hard disc drive read/write heads, portable and wearable electronics,
intracochlear applications, and energy harvesters.
| Specifications | |||
| Material Type | Lead Zirconium Titanate | ||
| Symbol | PZT | ||
| Purity | 99.9% | ||
| Size | 1.00" Dia. x 0.125" Thick ~8.00" Dia x 0.250" Thick / Custom | ||
| Package Unit | 1pc | ||
| Theoretical Density (g/cc) | -- | Melting Point (°C) | -- |
| Sputter | RF | Type of Bond | Indium, Elastomer |
