Sputtering Targets

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Indium Gallium Zinc Oxide (IGZO) Sputtering Target

Description:

IGZO sputter targetsare used for thin film deposition, typically for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc. The applications of IGZO thin films include transparent conductive oxide films, LED display, MEMS devices, etc...

Detail

Indium Gallium Zinc Oxide IGZO Sputter Targets


IGZO is a new type of semiconductor material with higher electron mobility than amorphous silicon (α-Si). 

IGZO is used as a channel material in a new generation of high-performance thin-film transistors (TFTs) to improve display panel resolution and 

make large-screen OLED TVs possible.


IGZO thin film is typically used for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc. 

The applications of IGZO thin films include transparent conductive oxide films, LED display, MEMS devices, etc.

IGZO Sputtering target


Specifications
Material TypeIndium Gallium Zinc Oxide
SymbolIn2O3:Ga2O3:ZnO=1:1:1 at%
Purity99.99%
Size1.00" Dia. x 0.125" Thick ~8.00" Dia x  0.250" Thick / Custom
Package Unit1pc
Theoretical Density (g/cc)6.5
Melting Point (°C)850 °CSputterRF, DC
Type of BondIndium, ElastomerMax Power Density
(Watts/Square Inch)
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