Silicon Carbide Sputtering Targets

Silicon Carbide Target Application Areas

1. Semiconductor and Electronic Devices

Power devices: SiC thin films are used in the manufacture of high-voltage, high-temperature semiconductor devices 

(e.g., MOSFETs, Schottky diodes) to improve energy conversion efficiency.

RF devices: In high-frequency communications (5G, radar), SiC's high electron saturation speed supports higher frequency operation.

2. Optoelectronics & Optics

UV Optoelectronic Devices: Used in UV detectors, LED substrates, especially outstanding in the short wavelength UV field.

Optical coatings: high refractive index and corrosion resistance make it suitable for infrared windows, laser lens protection layer.

3. Wear-resistant and protective coatings

Machine Tool Coatings: Extend the life of cutting tools, molds and dies (hardness up to 25-30 GPa).

Aerospace components: anti-erosion and anti-oxidation coatings for turbine blades, engine components.

4. High temperatures and extreme environments

Nuclear reactor materials: as a protective layer against radiation and high temperatures.

High-temperature sensors: thin films for pressure or gas sensing at extreme temperatures.

5. New and renewable sources of energy

Fuel cell: as a proton exchange membrane or bipolar plate coating to enhance corrosion resistance.

Lithium-ion battery: electrode protection layer, inhibit dendrite growth, improve safety.

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