Zirconium Oxide Sputtering Target, Zirconia ZrO2

Zirconium Dioxide (ZrO₂) Sputtering Targets: Key Applications

1. Optical Thin Films

ZrO₂ is valued for its high refractive index (~2.1–2.2 at 550 nm), broad transparency range (UV to IR), and low optical absorption. It is extensively used in:

Anti-reflective (AR) coatings for lenses, solar cells, and display panels.

High-reflectivity mirrors and interference filters.

Protective overcoats for laser optics and precision optical components.

2. Wear-Resistant and Hard Coatings

The high hardness (≈12 GPa) and wear resistance of ZrO₂ make it ideal for:

Protective coatings on cutting tools, molds, and mechanical components via PVD/CVD.

Tribological applications in aerospace and automotive industries.

3. High-Temperature Protective Coatings

ZrO₂'s thermal stability (melting point: ~2715°C) and low thermal conductivity (~2 W/m·K) enable its use in:

Thermal barrier coatings (TBCs) for gas turbine blades and jet engine components.

Yttria-stabilized zirconia (YSZ) coatings for enhanced phase stability under thermal cycling.

4. Solid Oxide Fuel Cells (SOFCs)

As an oxygen-ion conductor, YSZ (8% Y₂O₃-stabilized ZrO₂) serves as:

Electrolyte layers in SOFCs, operating at 800–1000°C.

Protective interlayers to mitigate electrode degradation.

5. Biomedical Coatings

ZrO₂'s biocompatibility and corrosion resistance support applications in:

Hydroxyapatite (HA)-based coatings for orthopedic/dental implants.

Wear-resistant surfaces for prosthetic joints.

6. Semiconductor and Electronic Devices

ZrO₂'s high dielectric constant (κ ≈ 20–25) and bandgap (~5–7 eV) make it suitable for:

Gate dielectric layers in MOSFETs and high-κ devices.

Insulating layers in capacitors and memory devices (e.g., DRAM).

Atomic layer deposition (ALD) for ultrathin, conformal films.

7. Corrosion-Resistant Coatings

ZrO₂'s chemical inertness enables its use in harsh environments, including:

Protective coatings for chemical reactors and marine components.

Anti-corrosion layers in desalination systems and nuclear applications.

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